Multifunctional optical MEMS sensor platform for wireless optical sensor networks

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1566-1569

  Pang, C ^a   Yu, M ^a   Zhang, X M ^b   Gupta, A K ^a   Bryden, K M ^c  

^a UNIVERSITY OF MARYLAND   (United States)

^b HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^c Iowa State University   (United States)

Author keywords

low coherence interferometry; Optical integration; optical sensors; wireless sensor network

Indexed keywords

HARSH ENVIRONMENT; LOW COHERENCE INTERFEROMETRY; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; OPTICAL COMPONENTS; OPTICAL INTEGRATION; OPTICAL MEASUREMENT; OPTICAL MEASUREMENT SYSTEMS; SENSING SIGNALS; SENSOR PLATFORM; SPACE-CONSTRAINED APPLICATIONS; WIRELESS SENSOR; WIRELESS-OPTICAL;

ACTUATORS; COMPOSITE MICROMECHANICS; INTERFEROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; OPTICAL DATA PROCESSING; OPTICAL FIBERS; OPTICAL SENSORS; OPTICAL SYSTEMS; OPTICAL VARIABLES MEASUREMENT; PRINTED CIRCUIT BOARDS; SENSOR NODES; SOLID-STATE SENSORS; TELECOMMUNICATION EQUIPMENT; WAVE INTERFERENCE;

WIRELESS NETWORKS;

EID: 80052122199     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969739     Document Type: Conference Paper

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