Technology and characteristics of microhumidity sensors

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 621-624

  Krutovertsev, S A ^a   Tarasova, A E ^a   Krutovertseva, L S ^a   Chuprin, M V ^a   Ivanova, O M ^a   Sazhinev, Yu S ^a  

^a JSC Ecological Sensors and Systems   (Russian Federation)

Author keywords

humidity sensor; Silica; sol gel; thin film

Indexed keywords

ACTIVE GAS; DEW POINTS; HIGH SENSITIVITY; HUMIDITY CONTENT; HYDROLYTIC POLYCONDENSATION; MICROELECTRONIC TECHNOLOGIES; OPERATION PRINCIPLES; PURE GAS; SILICA FILM; TECHNOLOGICAL FACTORS; TETRA-ETHYL-ORTHO-SILICATE;

ACTUATORS; MICROELECTRONICS; MICROSYSTEMS; ORGANIC SOLVENTS; POLYCONDENSATION; SILICA;

SOLID-STATE SENSORS;

EID: 80052121593     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969782     Document Type: Conference Paper

References (6)

1. N. Yamazoe, Y. Shimizu, "Humidity sensors: Principles and application", Sens. Actuators, Vol. 10, pp. 379-398, 1986.
2. A. R. K. Ralston, C. F. Klein, P. E. Thoma, D. D. Denton, "A model for the relative environmental stability of a series of polyimide capacitance humidity sensors", Sens. Actuators, Vol. B 34, pp. 343-348, 1996.
3. D. Saha, K. Kr. Mistry, R. Giri, A. Guha, K. Sensgupta, "Dependence of moisture absorption property on sol-gel process of transparent nanostructured γ-Al2O3 ceramics", Sens. Actuators, Vol. B 109, pp. 363-366, 2005.
4. S. Basu, S. Chatterjee, M. Saha, S. Bandyopadhay, K. Kr. Mistry, K. Sengupta, "Study of electrical characteristics of porous alumina sensors for detection of low moisture in gases", Sens. Actuators, Vol. B 79, pp. 182-186, 2001.
5. S. Krutovertsev, A. Tarasova, L. Krutovertseva, A. Zorin, O. Ivanova, "Humidity sensors based on polymer materials: technology and characteristics", Book of Abstracts, International conference on Materials for Advanced Technologies (ICMAT 2007), Singapore, 1-6 July, 2007, p. 61.
6. H. Guleryuz, I. Kaus, C. Filiàtre, T. Grande, M.-A. Einarsrud, "Deposition of silica thin films formed by sol-gel method", J. Sol-Gel Sci. Technol. , Vol. 54, pp. 249-257, 2010.