Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels

Journal of Advanced Mechanical Design, Systems and Manufacturing

Volumn 4, Issue 5, 2010, Pages 936-947

  Mishima, Koji ^a   Kakinuma, Yasuhiro ^a   Aoyama, Tojiro ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

3D shaped channel; Cryogenic micromachining; Microfluidic chip TAS; PDMS

Indexed keywords

3D SHAPED CHANNEL; CONVENTIONAL CUTTING; CUTTING MECHANISMS; CUTTING TEST; HIGH-ADHESION; LIQUID-NITROGEN COOLING; PDMS; PDMS SUBSTRATE; POLYDIMETHYLSILOXANE PDMS;

COMPOSITE MICROMECHANICS; CUTTING TOOLS; DEFORMATION; ELASTICITY; LIQUID NITROGEN; MICROCHANNELS; MICROMACHINING; SILICONES; THREE DIMENSIONAL;

CRYOGENICS;

EID: 80051953493     PISSN: None     EISSN: 18813054     Source Type: Journal    
DOI: 10.1299/jamdsm.4.936     Document Type: Article

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