Fabrication of three dimensional microchannels in SU8

Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Volumn 1, Issue , 2005, Pages 663-665

  Gracias, Alison ^a   Xu, Bai ^a   Castracane, James ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

MEMS; Micro channels; Micro fluidics; SU8

Indexed keywords

FLUIDICS; MEMS;

FABRICATION TECHNIQUE; SU8; THREE DIMENSIONAL MICROCHANNELS; UV DOSE CONTROL;

CHEMICAL ANALYSIS;

EID: 80051950429     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. M.Alavi, et al. "Fabrication of microchannels by laser machining and anisotropic etching of silicon", Sens. Actuators A 32 (1-3), April 1992, 229-302.
2. G. Liu, et al. "Fabrication of microchannels in negative resist", Microsystem Technologies 9 (6-7), 2003, 461-464.
3. A.Gadre, et al. "An Integrated BEMS Fabrication Technology", Proc. ISDRS, December 2001, Washington D.C.
4. F.E.H. Tay, et al. "A novel micro-machining method for the fabrication of thick-film SU- 8 embedded micro-channels", Journal of Micromech. MicroEng. 11 (1), 2001, 27-32.
5. http://www.microchem.com/products/su8-50-100.pdf.