Tunable RF filters fabricated using MOCVD deposited graded composition BST films

Integrated Ferroelectrics

Volumn 126, Issue 1, 2011, Pages 28-33

  Kalkur, T S ^a   Sbrockey, N ^b   Tompa, G S ^b   Cole, M W ^c  

^a University of Colorado at Colorado Springs   (United States)

^b STRUCTURED MATERIALS INDUSTRIES INC   (United States)

^c U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

BST; Compositional Graded; Ferroelectric; RF Filters; Thin Films; Tunable

Indexed keywords

BST; COMPOSITIONAL GRADED; FERROELECTRIC; RF FILTERS; TUNABLE;

BARIUM; BARIUM TITANATE; CAPACITORS; CHARACTERIZATION; ELECTRIC FIELDS; ELECTRODES; FABRICATION; FERROELECTRIC FILMS; FERROELECTRIC MATERIALS; FERROELECTRICITY; MEMS; PHOTOLITHOGRAPHY; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; PLATINUM; STRONTIUM; STRONTIUM TITANATES; THIN FILMS; WAVE FILTERS;

BARIUM STRONTIUM TITANATE;

EID: 80051693406     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584587.2011.574978     Document Type: Conference Paper

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