Design and simulation of SOI-MEMS electrostatic vibration energy harvester for micro power generation

InECCE 2011 - International Conference on Electrical, Control and Computer Engineering

Volumn , Issue , 2011, Pages 207-212

  Sidek, Othman ^a   Khalid, Muhammad Afif ^a   Ishak, Mohammad Zulfikar ^a   Miskam, Muhamad Azman ^a  

^a SCHOOL OF CHEMICAL ENGINEERING   (Malaysia)

Author keywords

electrostatic scavenger; energy harvesting; energy scavenging; vibration to electricity conversion

Indexed keywords

DESIGN AND SIMULATION; ELECTROMAGNETIC SYSTEMS; ELECTROSTATIC ENERGIES; ENERGY SCAVENGING; ENVIRONMENTAL CONDITIONS; EXCITATION FREQUENCY; FABRICATION PROCESS; MAXIMUM OUTPUT POWER; MICROPOWER GENERATION; SILICON-BASED; SIMULATION RESULT; SOI-MEMS; VIBRATION ENERGIES;

COMPUTER SIMULATION; ELECTRIC POWER GENERATION; ELECTROSTATIC GENERATORS; ELECTROSTATICS; HARVESTERS; MICROELECTRONICS; SCAVENGING;

ENERGY HARVESTING;

EID: 80051633219     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/INECCE.2011.5953877     Document Type: Conference Paper

References (16)

1. H. Okamoto, T. Suzuki, K. Mori, Z. Cao, T. Onuki and H. Kuwano, "The advantages and potential of electret-based vibration-driven micro energy harvesters," Int. J. Energy Res. 2009, pp. 1180-1190.
2. S. Meninger, T. O. Mur-Miranda, R. Amirtharajah, A. Chandrakasan and J. Lang, "Vibration-to-electric energy conversion," In proceeding of International Symposium onLow Power Electronics and Design, 1999, pp. 48-53.
3. F. Maier, M. Sturmlechner and S. Dierneder, "Novel energy harvester with low friction losses," In proceeding of 6th International Multi-Conference on Systems, Signals and Devices, 2009, pp. 1 - 6.
4. G. D. Pasquale, E. Brusa and A. Soma, "Capacitive vibration energy harvesting with resonance tuning," In proceeding of Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 2009, pp. 280 - 285.
5. M. S. Salem, M. O. S. Salem, A. A. Zekry and H. F. Ragai, "Determining the Required Pulses for Controlling the Operation of Electrostatic MEMS Converters," In proceeding of International Conference on MEMS, NANO and Smart Systems, 2006, pp. 27 - 30.
6. E. O. Torres and G. A. Rincon-Mora, "Electrostatic Energy Harvester and Li-Ion Charger Circuit for Micro-Scale Applications," In proceeding of 49th IEEE International Midwest Symposium on Circuits and Systems, 2006, pp. 65 - 69.
7. D. Hoffmann, B. Folkmer and Y. Manoli, "Fabrication, characterization and modelling of electrostatic micro-generators," J. Micromech. Microeng. 19, 2009, pp. 1-11.
8. G. Despesse, J. J. Chaillout, T. Jager, F, Cardot and A. Hoogerwerf, "Innovative Structure for Mechanical Energy Scavenging," In prooceding of International Solid-State Sensors, Actuators and Microsystems Conference, 2007, pp. 895 - 898.
9. G. De Pasquale and A. Soma, "Investigations on energy scavenging methods using MEMS devices," in proceeding of International Semiconductor Conference, 2008, pp.163 - 16.
10. E. Halvorsen, L. C. J. Blystad, S. Husa, S and E. Westby, "Simulation of Electromechanical Systems Driven by Large Random Vibrations," "International Conference on Perspective Technologies and Methods in MEMS Design, 2007, pp. 117-122.
11. B. C. Yen and J. H. Lang, "A variable-capacitance vibration-to-electric energy harvester," IEEE Transactions on Circuits and Systems I: Regular Papers, Volume: 53 , Issue: 2, 2006 , pp. 288 - 295.
12. G. D. Pasquale,E. Brusa and A. Soma, "Capacitive vibration energy harvesting with resonance tuning," Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 2009, pp. 280 - 285.
13. P. D. Mitcheson, P. Miao, B. H. Stark, E. M. Yeatman, A. S. Holmes and T. C. Green, "MEMS electrostatic micropower generator for low frequency operation," Sensors and Actuators A: Physical, Volume 115, Issues 2-3, 2004, pp. 523-529.
14. S. Roundy, P. K. Wright and K. S. J. Pister, "Micro electrostatic vibration-to-electricity converters," Proceeding of ASME International mechanical engineering congress & exposition, 2002, pp. 1-10.
15. E. O. Torres and G. A. Rincon-Mora, "Self-Tuning Electrostatic Energy- Harvester IC," IEEE Transactions on Circuits and Systems II: Express Briefs, Volume: 57 , Issue: 10, 2010 , pp. 808 - 812.
16. B. Diem, P. Rey, S. Renard, S. Viollet Bosson, H. Bono, F. Michel, M.T. Delaye, G. Delapierre, "SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators," Sensors and Actuators A: Physical, vol. 46, Issues 1-3, 1995, pp. 8-16.