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Thin Solid Films

Volumn 519, Issue 20, 2011, Pages 6840-6843

Improved thermal stability of ZnO transparent conducting films with a ZnO overlayer

(9) Kang, J H a,b Kim, D W a,b Kim, J H a Lim, Y S a Lee, M H a Seo, W S a Choi, H J b Seo, K H c Park, M G c

a Korea Institute of Ceramic Engineering and Technology (KICET) (South Korea)

b Yonsei University (South Korea)

c LG Display Co Ltd (South Korea)

Author keywords

Sputtering; Thermal stability; Transmission electron microscopy; Transparent conducting oxide; ZnO

Indexed keywords

STRUCTURAL CHARACTERIZATION; TRANSPARENT CONDUCTING FILMS; TRANSPARENT CONDUCTING OXIDE; ZNO; ZNO THIN FILM;

CONDUCTIVE FILMS; DEPOSITION; GALLIUM; METALLIC FILMS; OPTICAL FILMS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; ZINC OXIDE;

THERMODYNAMIC STABILITY;

EID: 80051544896 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.01.211 Document Type: Conference Paper

Times cited : (10)

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