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Volumn 83, Issue 23, 2011, Pages

Mechanism of nanostructure movement under an electron beam and its application in patterning

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EID: 79961177305     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.83.235438     Document Type: Article
Times cited : (9)

References (14)
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  • 5
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    • Specimen charging on thin films with one conducting layer: Discussion of physical principles
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