Quantifying the Knudsen force on heated microbeams: A compact model and direct comparison with measurements

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 83, Issue 6, 2011, Pages

  Nabeth, Jeremy ^a   Chigullapalli, Sruti ^a   Alexeenko, Alina A ^a  

^a Purdue University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENTS; ANALYSIS AND DESIGN; ATOMIC FORCE MICROSCOPES; BHATNAGAR-GROSS-KROOK APPROXIMATIONS; BOLTZMANN KINETIC EQUATIONS; CLOSED-FORM MODELS; COLLISIONAL RELAXATION; COMPACT MODEL; COMPARISON WITH MEASUREMENTS; ENERGY EXCHANGES; EXPERIMENTAL MEASUREMENTS; FORCE COEFFICIENTS; GAS MOLECULES; KNUDSEN; MICRO BEAMS; MICRO-CANTILEVERS; MICRO-SCALES; MODERATE TEMPERATURE; NONDIMENSIONAL; NUMERICAL SOLUTION; OPERATING PRESSURE; PRESSURE CONDITIONS; THERMAL NON-EQUILIBRIUM;

ATOMIC FORCE MICROSCOPY; BOLTZMANN EQUATION; HELIUM; INTEGRAL EQUATIONS; NITROGEN;

ARGON;

EID: 79961072808     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.83.066306     Document Type: Article

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