The NANOMEFOS non-contact measurement machine for freeform optics

Precision Engineering

Volumn 35, Issue 4, 2011, Pages 607-624

  Henselmans, R ^a,b   Cacace, L A ^b,c   Kramer, G F Y ^a   Rosielle, P C J N ^b   Steinbuch, M ^b  

^a TNO   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c AC Optomechanix   (Netherlands)

Author keywords

Asphere; Freeform optics; Measurement machine; Metrology frame; NANOMEFOS; Non contact

Indexed keywords

ASPHERES; FREEFORM OPTICS; MEASUREMENT MACHINE; NANOMEFOS; NON-CONTACT;

MACHINE COMPONENTS; OPTICAL SYSTEMS; OPTICS; SILICON CARBIDE; SURFACE MEASUREMENT; UNITS OF MEASUREMENT;

INTERFEROMETRY;

EID: 79960845211     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2011.04.004     Document Type: Article

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