Sensitivity analysis of lateral field excited acoustic wave gas sensors with finite element method

Japanese Journal of Applied Physics

Volumn 50, Issue 7 PART 2, 2011, Pages

  Chen, Yung Yu ^a   Liu, Chih Chieh ^a  

^a TATUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE SENSORS; EIGENFREQUENCY; ELECTRICAL CONDUCTIVITY; ELECTRICAL VARIATIONS; FINITE ELEMENT SOFTWARE; FREQUENCY RESPONSE ANALYSIS; GAS CONCENTRATION; GAS DETECTION; HIGH SENSITIVITY; LATERAL FIELD EXCITED; MASS DENSITIES; QCM SENSORS; QUARTZ CRYSTAL MICROBALANCE SENSORS; SENSING APPLICATIONS; SENSING RANGES; SENSING SURFACE; SHIELDING ELECTRODES; SIMULATION RESULT; THEORETICAL MODELING;

ACOUSTIC WAVES; ACOUSTICS; CHEMICAL SENSORS; COMPUTER SOFTWARE; ELECTRIC CONDUCTIVITY; ELECTRIC FIELDS; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; GAS DETECTORS; GASES; QUARTZ; QUARTZ CRYSTAL MICROBALANCES;

SENSITIVITY ANALYSIS;

EID: 79960568977     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.07HD05     Document Type: Article

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