Electrode optimization for a lateral field excited acoustic wave sensor

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 314-318

  Meissner, M ^a   French Jr , L A ^b   Pinkham, W ^b   York, C ^b   Bernhardt, G ^b   Pereira Da Cunha, M ^b   Vetelino, J F ^b  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

^b UNIVERSITY OF MAINE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODE OPTIMIZATION; LATERAL FIELD EXCITED ACOUSTIC WAVE SENSORS; QUARTZ CRYSTAL MICROBALANCE (QCM); THICKNESS SHEAR MODE (TSM);

ACOUSTIC WAVES; CHROMIUM; DATA ACQUISITION; ELECTRIC FIELD EFFECTS; ELECTRODES; MAGNETRON SPUTTERING;

SENSORS;

EID: 21644433623     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2004.1417728     Document Type: Conference Paper

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