Micro-machined tunable optical filters with optimized band-pass spectrum

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1494-1497

  Hohlfeld, D ^a   Zappe, H ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Band pass filters; Dielectric devices; Dielectric thin films; Fabry Perot interferometers; Monitoring; Optical fiber communication; Optical filters; Shape; Silicon; Solid state circuits

Indexed keywords

ACTUATORS; DIELECTRIC DEVICES; FABRY-PEROT INTERFEROMETERS; FIBER OPTIC SENSORS; INTERFEROMETERS; MICROSYSTEMS; MONITORING; OPTICAL COMMUNICATION; OPTICAL FIBER COMMUNICATION; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL FILTERS; SILICON; SOLID-STATE SENSORS; THIN FILMS; TRANSDUCERS;

DIELECTRIC THIN FILMS; OPTIMIZED FILTERS; SHAPE; SHAPE FUNCTIONS; SILICON CAVITY; SOLID-STATE CIRCUITS; THIN FILM METAL; TUNABLE OPTICAL FILTERS;

BANDPASS FILTERS;

EID: 79960524138     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217060     Document Type: Conference Paper

References (6)

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