Research on chromatic confocal technology for displacement measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7997, Issue , 2011, Pages

  Deng, Wenyi ^a   Niu, Chunhui ^a   Lv, Naiguang ^a   Gao, Xin ^a  

^a BEIJING INFORMATION SCIENCE AND TECHNOLOGY UNIVERSITY   (China)

Author keywords

Chromatic confocal technique; Displacement measurement; Optical design; Precision analysis

Indexed keywords

CHROMATIC ABERRATION; CHROMATIC CONFOCAL TECHNIQUE; CONFOCAL METHOD; CONFOCAL TECHNOLOGY; CONTINUUM SPECTRA; DATA PROCESSING METHODS; DISPLACEMENT MEASUREMENTS; EXPERIMENT SYSTEM; EXPERIMENTAL SYSTEM; LIGHT RESOURCES; MULTI-LENS; OBJECTIVE LENS; PRECISION ANALYSIS; SPECTRUM LINE; SPECTRUM WIDTH; TARGET SURFACE;

CHROMATIC DISPERSION; DATA HANDLING; DISPERSION (WAVES); EXPERIMENTS; LENSES; LIGHT SOURCES; MICROWAVE SPECTROGRAPHS; OPTICAL BEAM SPLITTERS; OPTICAL DESIGN; OPTICAL SYSTEMS; SPECTRUM ANALYZERS;

ABERRATIONS;

EID: 79960406134     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.888521     Document Type: Conference Paper

References (4)

1. B. S. Chun, K. Kim, and D. Gweon, Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope, Rev. Sci. Instru. 80, 305-308, 2009.
2. Chric Jones, Non-contact displacement measurement, Power in Motion, 10, 12-13, 2008.
3. S. L. Dobson, P. C. Sun, and Y. Fainman, "Diffractive lens for chromatic confocal imaging", Appl. Opt. 36, 4744-4748, 1997. (Pubitemid 127615607)
4. J Garzón R, J Meneses, G Tribillon, TGharbi and A Plata, "Chromatic confocal microscopy by means of continuum light generated through a standard single-mode fibre", Opt, 6, 544-548, 2004.