Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope

Review of Scientific Instruments

Volumn 80, Issue 7, 2009, Pages

  Chun, Byung Seon ^a   Kim, Kwangsoo ^a   Gweon, Daegab ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM SCANNING; CHROMATIC CONFOCAL MICROSCOPY; CONFOCAL MICROSCOPES; FIELD OF VIEWS; SAMPLE STRUCTURE; SCANNING ANGLES; THREE-DIMENSIONAL SURFACE;

CONFOCAL MICROSCOPY; SURFACE MEASUREMENT; THREE DIMENSIONAL;

SCANNING;

EID: 68949119672     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3184023     Document Type: Article

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