The design and manufacture of functional micro-stationary PCR chip

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

Volumn 6767 LNCS, Issue PART 3, 2011, Pages 398-404

  Nie, Jinquan ^a   Zhao, Yulong ^a   Liu, Yimin ^a   Liu, Keyin ^a   Peng, Niancai ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

doped semiconductor; MEMS; PCR; temperature distribution; temperature uniformity

Indexed keywords

FINITE ELEMENT METHOD; FUNCTIONAL POLYMERS; HEATING EQUIPMENT; HUMAN COMPUTER INTERACTION; INFRARED IMAGING; ION IMPLANTATION; KNOWLEDGE MANAGEMENT; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; PLATINUM; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DOPING; SILICON WAFERS; TEMPERATURE DISTRIBUTION; THERMOANALYSIS; WET ETCHING;

A-THERMAL; COMPLEX PROCESSES; DOPED SEMICONDUCTOR; IMPLANTATION TECHNOLOGY; INFRARED IMAGES; MICROFABRICATED; MICROHEATER; PCR; PCR CHIPS; REACTION CHAMBERS; SIMULATION RESULT; TEMPERATURE UNIFORMITY;

POLYMERASE CHAIN REACTION;

EID: 79960329491     PISSN: 03029743     EISSN: 16113349     Source Type: Book Series    
DOI: 10.1007/978-3-642-21666-4_44     Document Type: Conference Paper

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