Analysis of trace impurities in semiconductor gas via cavity-enhanced direct frequency comb spectroscopy

Applied Physics B: Lasers and Optics

Volumn 100, Issue 4, 2010, Pages 917-924

  Cossel, K C ^a   Adler, F ^a   Bertness, K A ^b   Thorpe, M J ^a   Feng, J ^c   Raynor, M W ^c   Ye, J ^a  

^a UNIVERSITY OF COLORADO   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c Matheson Tri Gas Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SENSITIVITY; BACKGROUND GAS; BROAD-BAND SPECTRUM; CONVENTIONAL SYSTEMS; DETECTION SENSITIVITY; FREQUENCY COMBS; HIGH BANDWIDTH; HIGH RESOLUTION; HIGH SENSITIVITY; III-V SEMICONDUCTOR COMPOUNDS; IMPURITIES IN; NONLINEAR OPTICAL PROCESS; PROCESS GAS; PROOF-OF-PRINCIPLE EXPERIMENTS; RAPID DATA ACQUISITION; SINGLE-CHANNEL; SPECTRAL LINE; SPECTRAL REGION; TRACE DETECTION; TRACE GAS DETECTION; TRACE IMPURITIES; WATER IMPURITIES;

ASSOCIATED GAS; IMPURITIES; INDUSTRIAL APPLICATIONS; SPECTROSCOPY;

TRACE ANALYSIS;

EID: 79960170061     PISSN: 09462171     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00340-010-4132-5     Document Type: Article

References (29)

1. S. K. Lehman, K. A. Bertness, J. T. Hodges, J. Cryst. Growth 250, 262 (2003)
2. H. H. Funke, B. L. Grissom, C. E. McGrew, M. W. Raynor, Rev. Sci. Instrum. 74, 1 (2003)
3. H. H. Funke, M. W. Raynor, K. A. Bertness, Y. Chen, Appl. Spectrosc. 61, 419 (2007)
4. J. Feng, R. Clement, M. Raynor, J. Cryst. Growth 310, 4780 (2008)
5. P. R. Griffiths, J. A. D. Haseth, Fourier Transform Infrared Spectroscopy (Wiley-Interscience, Hoboken, 2007)
6. K. Siefering, H. Berger, W. Whitlock, J. Vac. Sci. Technol. A 11, 1593 (1993)
7. S. Y. Lehman, K. A. Bertness, J. T. Hodges, J. Cryst. Growth 261, 225 (2004)
8. M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, J. Ye, Science 311, 1595 (2006)
9. M. J. Thorpe, J. Ye, Appl. Phys. B, Lasers Opt. 91, 397 (2008)
10. M. J. Thorpe, D. Balslev-Clausen, M. S. Kirchner, J. Ye, Opt. Express 16, 2387 (2008)
11. S. W. Sharpe, T. J. Johnson, R. L. Sams, P. M. Chu, G. C. Rhoderick, P. A. Johnson, Appl. Spectrosc. 58, 1452 (2004)
12. R. Wehr, S. Kassi, D. Romanini, L. Gianfrani, Appl. Phys. B, Lasers Opt. 92, 459 (2008)
13. M. H. Dunn, M. Ebrahimzadeh, Science 286, 1513 (1999)
14. M. Hamilton, R. Peverall, G. Ritchie, L. Thornton, J. van Helden, Appl. Phys. B, Lasers Opt. 97, 715 (2009)
15. L. E. Nelson, D. J. Jones, K. Tamura, H. A. Haus, E. P. Ippen, Appl. Phys. B, Lasers Opt. 65, 277 (1997)
16. M. Shirasaki, Opt. Lett. 21, 366 (1996)
17. S. Xiao, A. M. Weiner, Opt. Express 12, 2895 (2004)
18. S. A. Diddams, L. Hollberg, V. Mbele, Nature 445, 627 (2007)
19. C. C. Davis, Lasers and Electro-Optics: Fundamentals and Engineering (Cambridge University Press, Cambridge, 1996)
20. L. S. Rothman, I. E. Gordon, A. Barbe, D. C. Benner, P. E. Bernath, M. Birk, V. Boudon, L. R. Brown, A. Campargue, J. P. Champion, K. Chance, L. H. Coudert, V. Dana, V. M. Devi, S. Fally, J. M. Flaud, R. R. Gamache, A. Goldman, D. Jacquemart, I. Kleiner, N. Lacome, W. J. Lafferty, J. Y. Mandin, S. T. Massie, S. N. Mikhailenko, C. E. Miller, N. Moazzen-Ahmadi, O. V. Naumenko, A. V. Nikitin, J. Orphal, V. I. Perevalov, A. Perrin, A. Predoi-Cross, C. P. Rinsland, M. Rotger, M. Simeckova, M. A. H. Smith, K. Sung, S. A. Tashkun, J. Tennyson, R. A. Toth, A. C. Vandaele, J. Vander Auwera, J. Quant. Spectrosc. Radiat. Transf. 110, 533 (2009)
21. A. Hubaux, G. Vos, Anal. Chem. 42, 849 (1970)
22. G. L. Long, J. D. Winefordner, Anal. Chem. 55, 712A (1983)
23. SEMI Standard, C10-1109, Guide for Determination of Method Detection Limits. Available from Semiconductor Equipment and Materials International, 3081 Zanker Road, San Jose, CA 95134, USA. http://www.semi.org
24. K. K. Lehmann, P. S. Johnston, P. Rabinowitz, Appl. Opt. 48, 2966 (2009)
25. F. Keilmann, C. Gohle, R. Holzwarth, Opt. Lett. 29, 1542 (2004)
26. A. Schliesser, M. Brehm, F. Keilmann, D. W. van der Weide, Opt. Express 13, 9029 (2005)
27. I. Coddington, W. C. Swan, N. R. Newbury, Phys. Rev. Lett. 100, 013902 (2008)
28. B. Berhardt, A. Ozawa, P. Jacquet, M. Jacquey, Y. Kobayashi, T. Udem, R. Holzwarth, G. Guelachvili, T. W. Hänsch, N. Picqué, Nat. Photonics 4, 55 (2010)
29. F. Adler, K. C. Cossel, M. J. Thorpe, I. Hartl, M. E. Fermann, J. Ye, Opt. Lett. 34, 1330 (2009)