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Volumn 310, Issue 23, 2008, Pages 4780-4785

Characterization of high-purity arsine and gallium arsenide epilayers grown by MOCVD

(3) Feng, Jun a Clement, Ryan a Raynor, Mark a

Author keywords

A1. High purity; A1. Impurities; A1. Low temperature photoluminescence; A1. Purification; A3. Metal organic chemical vapor deposition; B2. Arsine; B2. GaAs

Indexed keywords

ADSORPTION; AIR CLEANERS; AIR PURIFICATION; ARSENIC COMPOUNDS; CYLINDERS (SHAPES); DISTILLATION; EPILAYERS; EPITAXIAL GROWTH; GALLIUM ALLOYS; GALLIUM COMPOUNDS; GAS ADSORPTION; GASES; GERMANIUM; HYDROCARBON REFINING; HYDROCARBONS; IMPURITIES; INDUSTRIAL CHEMICALS; LIGHT EMISSION; LUMINESCENCE; METAL REFINING; ORGANIC CHEMICALS; ORGANIC COMPOUNDS; ORGANOMETALLICS; PHOTOLUMINESCENCE; PURIFICATION; SEMICONDUCTING GALLIUM; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTING ORGANIC COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR QUANTUM WELLS; SENSITIVITY ANALYSIS; VAPORS; WATER VAPOR; ZINC;

A1. HIGH PURITY; A1. IMPURITIES; A1. LOW TEMPERATURE PHOTOLUMINESCENCE; A1. PURIFICATION; A3. METAL ORGANIC CHEMICAL VAPOR DEPOSITION; B2. ARSINE; B2. GAAS;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 56249094804 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2008.08.023 Document Type: Article

Times cited : (12)

References (31)

1
- 0026953188
- Reynolds C.L., Vuong Jr. H.H.T., Peticolas L.J., and Reading P.A. IEEE Trans. Electron Devices 39 (1992) 2459
- (1992) IEEE Trans. Electron Devices , vol.39 , pp. 2459
- Reynolds, C.L.¹ Vuong Jr., H.H.T.² Peticolas, L.J.³ Reading, P.A.⁴

2
- 0026942814
- Ikeda T., Noda H., and Matsumoto K. J. Crystal Growth 124 (1992) 272
- (1992) J. Crystal Growth , vol.124 , pp. 272
- Ikeda, T.¹ Noda, H.² Matsumoto, K.³

3
- 0031069473
- Oelgart G., Gramlich S., Begunde T., Richter E., and Weyers M. Mat. Sci. Eng. B 44 (1997) 228
- (1997) Mat. Sci. Eng. B , vol.44 , pp. 228
- Oelgart, G.¹ Gramlich, S.² Begunde, T.³ Richter, E.⁴ Weyers, M.⁵

4
- 56249111020
- M.W. Raynor, J. Lapenta, H. Spicer, Development in the measurement and removal of ultratrace germane contamination in high purity arsine, ICMOVPE-XIII Abstract, Miyazaki, Japan, 2006, pp. 397-398.
- M.W. Raynor, J. Lapenta, H. Spicer, Development in the measurement and removal of ultratrace germane contamination in high purity arsine, ICMOVPE-XIII Abstract, Miyazaki, Japan, 2006, pp. 397-398.

5
- 36449008001
- Mccalmont J.S. J. Appl. Phys. 71 (1992) 1046
- (1992) J. Appl. Phys. , vol.71 , pp. 1046
- Mccalmont, J.S.¹

6
- 2842564365
- Stiles K., Mao D., and Kahn A. J. Vac. Sci. Technol. B 6 (1988) 1170
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1170
- Stiles, K.¹ Mao, D.² Kahn, A.³

7
- 0000466551
- Chen Y., Seo J.M., Stepniak F., and Weaver J. J. Chem. Phys. 95 (1991) 8442
- (1991) J. Chem. Phys. , vol.95 , pp. 8442
- Chen, Y.¹ Seo, J.M.² Stepniak, F.³ Weaver, J.⁴

8
- 33751435055
- Simcock M.N., He L., and Pemble M.E. Surface Sci. 600 (2006) 309
- (2006) Surface Sci. , vol.600 , pp. 309
- Simcock, M.N.¹ He, L.² Pemble, M.E.³

9
- 34247249381
- Alt H.C., Gomeniuk Y.V., and Kretzer U. J. Appl. Phys. 101 (2007) 073516
- (2007) J. Appl. Phys. , vol.101 , pp. 073516
- Alt, H.C.¹ Gomeniuk, Y.V.² Kretzer, U.³

10
- 0000971347
- Meyer B.K., Hofmann D.M., Niklas J.R., and Spaeth J.M. Phys. Rev. B 36 (1987) 1332
- (1987) Phys. Rev. B , vol.36 , pp. 1332
- Meyer, B.K.¹ Hofmann, D.M.² Niklas, J.R.³ Spaeth, J.M.⁴

11
- 35048814507
- Feng J., Raynor M.W., and Chen Y. Compd. Semicond. 13 (2007) 31
- (2007) Compd. Semicond. , vol.13 , pp. 31
- Feng, J.¹ Raynor, M.W.² Chen, Y.³

12
- 56249125017
- T. Maeda, et al., US Patent 5,064,778.
- T. Maeda, et al., US Patent 5,064,778.

13
- 36549090800
- Hanna M.C., Lu Z.H., Oh E.G., Mao E., and Majerfeld A. Appl. Phys. Lett. 57 (1990) 1120
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1120
- Hanna, M.C.¹ Lu, Z.H.² Oh, E.G.³ Mao, E.⁴ Majerfeld, A.⁵

14
- 0006573342
- Razeghi M., Omnes F., Nagle J., Defour M., Acher O., and Bove P. Appl. Phys. Lett. 55 (1989) 1677
- (1989) Appl. Phys. Lett. , vol.55 , pp. 1677
- Razeghi, M.¹ Omnes, F.² Nagle, J.³ Defour, M.⁴ Acher, O.⁵ Bove, P.⁶

15
- 0006418451
- Wang Z.M., As D.J., Windscheif J., Bachem K.H., and Jantz W. Appl. Phys. Lett. 60 (1992) 1609
- (1992) Appl. Phys. Lett. , vol.60 , pp. 1609
- Wang, Z.M.¹ As, D.J.² Windscheif, J.³ Bachem, K.H.⁴ Jantz, W.⁵

16
- 2842525993
- Ashen D.J., Dean P.J., Hurle D.T.J., Mullin J.B., White A.M., and Greene P.D. J. Phys. Chem. Solids 36 (1975) 1041
- (1975) J. Phys. Chem. Solids , vol.36 , pp. 1041
- Ashen, D.J.¹ Dean, P.J.² Hurle, D.T.J.³ Mullin, J.B.⁴ White, A.M.⁵ Greene, P.D.⁶

17
- 0042399279
- Hwang C.J. Phys. Rev. B 8 (1973) 646
- (1973) Phys. Rev. B , vol.8 , pp. 646
- Hwang, C.J.¹

18
- 0020799565
- Xu Z.Y., Kreismanis V.G., and Tang C.L. J. Appl. Phys. 54 (1983) 4536
- (1983) J. Appl. Phys. , vol.54 , pp. 4536
- Xu, Z.Y.¹ Kreismanis, V.G.² Tang, C.L.³

19
- 0000151015
- Sell D.D. Phys. Rev. B 6 (1972) 3750
- (1972) Phys. Rev. B , vol.6 , pp. 3750
- Sell, D.D.¹

20
- 0020750974
- Lewis C.R., Dietze W.T., and Ludowise M.J. J. Electron. Mater. 12 (1983) 507
- (1983) J. Electron. Mater. , vol.12 , pp. 507
- Lewis, C.R.¹ Dietze, W.T.² Ludowise, M.J.³

21
- 0004872629
- Timmons M.L., Chiang P.K., and Hattangady S.V. J. Crystal Growth 77 (1986) 37
- (1986) J. Crystal Growth , vol.77 , pp. 37
- Timmons, M.L.¹ Chiang, P.K.² Hattangady, S.V.³

22
- 0016952750
- Lin A.L., Omelianovski E., and Bube R.H. J. Appl. Phys. 47 (1976) 1852
- (1976) J. Appl. Phys. , vol.47 , pp. 1852
- Lin, A.L.¹ Omelianovski, E.² Bube, R.H.³

23
- 0010277143
- Schneider J., Dischler B., Seelewind H., Mooney P.M., Lagowski J., Matsui M., Beard D.R., and Newman R.C. Appl. Phys. Lett. 54 (1989) 1442
- (1989) Appl. Phys. Lett. , vol.54 , pp. 1442
- Schneider, J.¹ Dischler, B.² Seelewind, H.³ Mooney, P.M.⁴ Lagowski, J.⁵ Matsui, M.⁶ Beard, D.R.⁷ Newman, R.C.⁸

24
- 0031312253
- Machado W.V., Cipriano E.C., and Amato M.A. Brazilian J. Phys. 27 (1997) 116
- (1997) Brazilian J. Phys. , vol.27 , pp. 116
- Machado, W.V.¹ Cipriano, E.C.² Amato, M.A.³

25
- 3743110981
- Alt H.Ch. Phys. Rev. Lett. 65 (1990) 3421
- (1990) Phys. Rev. Lett. , vol.65 , pp. 3421
- Alt, H.Ch.¹

26
- 0029341716
- Linde M., Spaeth J.-M., and Alt H.Ch. Appl. Phys. Lett. 67 (1995) 662
- (1995) Appl. Phys. Lett. , vol.67 , pp. 662
- Linde, M.¹ Spaeth, J.-M.² Alt, H.Ch.³

27
- 56249099454
- McCluskey M.D. J. Appl. Phys. 87 (2000) 3595
- (2000) J. Appl. Phys. , vol.87 , pp. 3595
- McCluskey, M.D.¹

28
- 27144454125
- Ulrici W., and Jurisch M. Phys. Status Solidi B 242 (2005) 2433
- (2005) Phys. Status Solidi B , vol.242 , pp. 2433
- Ulrici, W.¹ Jurisch, M.²

29
- 16444377814
- Harrison D.A., Stotz J.A.H., Karasyuk V.A., Watkins S.P., Thewalt M.L.W., Beckett D.J.S., and SpringThorpe A.J. Phys. Rev. B 60 (1999) 15527
- (1999) Phys. Rev. B , vol.60 , pp. 15527
- Harrison, D.A.¹ Stotz, J.A.H.² Karasyuk, V.A.³ Watkins, S.P.⁴ Thewalt, M.L.W.⁵ Beckett, D.J.S.⁶ SpringThorpe, A.J.⁷

30
- 11744303070
- Harrison D.A., Watkins S.P., Thewalt M.L.W., Beckett D.J.S., and SpringThorpe A.J. Phys. Rev. Lett. 80 (1998) 2461
- (1998) Phys. Rev. Lett. , vol.80 , pp. 2461
- Harrison, D.A.¹ Watkins, S.P.² Thewalt, M.L.W.³ Beckett, D.J.S.⁴ SpringThorpe, A.J.⁵

31
- 16444377814
- Harrison D.A., Stotz J.A.H., Karasyuk V.A., Watkins S.P., Thewalt M.L.W., Beckett D.J.S., and SpringThorpe A.J. Phys. Rev. B 60 (1999) 15527
- (1999) Phys. Rev. B , vol.60 , pp. 15527
- Harrison, D.A.¹ Stotz, J.A.H.² Karasyuk, V.A.³ Watkins, S.P.⁴ Thewalt, M.L.W.⁵ Beckett, D.J.S.⁶ SpringThorpe, A.J.⁷

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