Fabrication of Schottky diodes for terahertz imaging

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2544-2546

  Giovine, E ^a   Casini, R ^a   Dominijanni, D ^a   Notargiacomo, A ^a   Ortolani, M ^a   Foglietti, V ^a  

^a IFN CNR   (Italy)

Author keywords

Air bridge; EBL; Schottky diode; T gate; THz detector

Indexed keywords

AIR-BRIDGES; EBL; SCHOTTKY DIODES; T-GATE; THZ DETECTORS;

CUTOFF FREQUENCY; FABRICATION; LITHOGRAPHY; SCHOTTKY BARRIER DIODES;

DIODES;

EID: 79960046650     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.107     Document Type: Conference Paper

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