Picosecond laser patterning of ITO thin films

Physics Procedia

Volumn 12, Issue PART 2, 2011, Pages 133-140

  Risch, Anna ^a   Hellmann, Ralf ^a  

^a UNIVERSITY OF APPLIED SCIENCES ASCHAFFENBURG   (Germany)

Author keywords

Indium tin oxide; ITO; Laser patterning; Picosecond laser

Indexed keywords

ABLATION; HEAT AFFECTED ZONE; IRRADIATION; MANUFACTURE; THIN FILMS;

COMPARATIVE STUDIES; INDIUM TIN OXIDE; ITO THIN FILMS; LASER PATTERNING; OLED APPLICATIONS; PICOSECOND LASER; SINGLE PULSE; THREE-WAVELENGTHS;

TIN OXIDES;

EID: 79959468835     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2011.03.115     Document Type: Conference Paper

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