Reducing the impact of reticle CD-non-uniformity of multiple structures by dose corrections based on aerial image measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7638, Issue , 2010, Pages

  Buttgereit, Ute ^a   Birkner, Robert ^a   Scheruebl, Thomas ^a   De Putter, Sander ^b   Kastrup, Bernardo ^b   Finders, Jo ^b  

^a CARL ZEISS SMT AG   (Germany)

^b ASML   (Netherlands)

Author keywords

aerial image measurements; dose correction; DRAM; Intra Field CDU; reticle CDU; reticle qualification; rotated brick wall

Indexed keywords

AERIAL IMAGE MEASUREMENT; DOSE CORRECTION; INTRA-FIELD CDU; RETICLE CDU; RETICLE QUALIFICATION; ROTATED BRICK WALL;

BRICK; OPTICAL INSTRUMENTS; PROCESS CONTROL; UNITS OF MEASUREMENT;

MASKS;

EID: 79958061562     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.848053     Document Type: Conference Paper

References (4)

1. Changhyun Cho, Sangho Song, Sangho Kim, Sungho Jang, Sungsam Lee, Hyungtak Kim, Yangsoo Sung, Sangmin Jeon, Gisung Yeo, Youngsun Kim, Yungi Kim, Gyoyoung Jin and Kinam Kim, A 6F2 DRAM Technology in 60nm era for Gigabit Densities, 2005 Symposium on VLSI Technology Digest of Technical Papers (2005) pp36-37.
2. Sven Martin, Holger Seitz, Wolfgang Degel, Ute Buttgereit, Thomas Scherübl, "WLCD: A new System for Wafer Level CD Metrology on Photomasks", Proc. SPIE, Volume 7272 (2009), pp. 72722T-72722T-9 (2009).
3. F.Dufaye, S.Gough, F.Sundermann, V.Farysa,H.Miyashita, L.Sartelli, F. Perissinotti, U.Buttgereit, S.Perlitz, R.Birkner, "Mask phase and transmission variation effects on wafer critical dimensions for nodes 65nm and 45nm", EMLC (2010).
4. K. Nafus, T. Shimoaoki, M. Enomoto, H. Shite, T. Otsuka, H. Kosugi, T. Shibata, J. Mallmann, R. Maas, C. Verspaget, E. van der Heijden, E. van Setten, J. Finders, S. Wang, N. Boudou, C. Zoldesi, Improvements in process performance for immersion technology high volume manufacturing. Proceedings of the SPIE, Volume 7273 (2009)., pp. 727338-727338-11 (2009).