Nanostencil lithography for high-throughput fabrication of infrared plasmonic sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8031, Issue , 2011, Pages

  Aksu, Serap ^a,b   Yanik, Ahmet A ^a,b   Adato, Ronen ^a,b   Artar, Alp ^a,b   Huang, Min ^a,b   Altug, Hatice ^a,b  

^a Boston University   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

infrared spectroscopy; nanoplasmonics; nanostencil lithography; near field effects; optical nanoantenna; Shadow mask; surface plasmons

Indexed keywords

NANOANTENNAS; NANOPLASMONICS; NANOSTENCILS; NEAR-FIELD EFFECTS; SHADOW MASK; SURFACE PLASMONS;

ABSORPTION SPECTROSCOPY; ANTENNA ARRAYS; FABRICATION; INFRARED SPECTROSCOPY; LITHOGRAPHY; NANORODS; NANOTECHNOLOGY; RESONANCE; REUSABILITY; SENSORS; SUBSTRATES; SURFACES; THROUGHPUT; VIBRATIONAL SPECTROSCOPY;

PLASMONS;

EID: 79957996865     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.884105     Document Type: Conference Paper

References (4)

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2. Adato, R.,Yanik, A., Amsden, J.J., Kaplan, D.L., Omenetto, M.K.H., Erramili, S., Altug, H., "Ultra-sensitive vibrational spectroscopy of protein monolayers with plasmonic nanoantenna arrays", Proceedings of National Academy of Science (PNAS) 106, 19227-18232 (2009).
3. Aksu, S., Yanik, A., Adato, R., Artar, A., Huang, M., Altug, H., "High-throughput Nanofabrication of Plasmonic Infrared NanoAntenna Arrays for Vibrational Nanospectroscopy", Nano Lett., 10 (7), pp 2511-2518 (2010).
4. Vazquez Mena, O., Villanueva, G., Savu, V., Sidler, K., van den Boogaart, M.A.F. and Brugger, J." Metallic Nanowires by Full Wafer Stencil Lithography", Nano Letters, 8(11) pp. 3675-3682 (2008).