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Volumn 25, Issue 1-4, 1999, Pages 37-46

Deposition of LiNbO3 thin films on diamond/Si(100) substrates for high frequency surface acoustic wave filter applications

Author keywords

LiNbO3; Metal organic deposition; Surface acoustic wave; Thin films

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; CRYSTAL ORIENTATION; DECOMPOSITION; DEPOSITION; LITHIUM NIOBATE; POLYCRYSTALS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING DIAMONDS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

EID: 0033325160     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589908210158     Document Type: Article
Times cited : (8)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.