|
Volumn 25, Issue 1-4, 1999, Pages 37-46
|
Deposition of LiNbO3 thin films on diamond/Si(100) substrates for high frequency surface acoustic wave filter applications
|
Author keywords
LiNbO3; Metal organic deposition; Surface acoustic wave; Thin films
|
Indexed keywords
ACOUSTIC SURFACE WAVE FILTERS;
CRYSTAL ORIENTATION;
DECOMPOSITION;
DEPOSITION;
LITHIUM NIOBATE;
POLYCRYSTALS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING DIAMONDS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
GIGAHERTZ ELECTRONICAL FILTERS;
HIGHLY TEXTURE POLYCRYSTALLINE;
METAL ORGANIC DECOMPOSITION;
THIN FILMS;
|
EID: 0033325160
PISSN: 10584587
EISSN: None
Source Type: Journal
DOI: 10.1080/10584589908210158 Document Type: Article |
Times cited : (8)
|
References (12)
|