Heat-treatment-induced ferroelectric fatigue of Pt/Sr1-xBi 2+yTa2O9/Pt thin-film capacitors

Applied Physics Letters

Volumn 81, Issue 8, 2002, Pages 1477-1479

  Jin, Shi Zhao ^a   Lim, Ji Eun ^a   Cho, Moon Joo ^a   Hwang, Cheol Seong ^a   Kim, Seung Hyun ^b  

^a Seoul National University   (South Korea)

^b INOSTEK Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; FERROELECTRIC FATIGUE; FERROELECTRIC SBT THIN FILMS; FURNACE ANNEALING; HEAT TREATMENT TEMPERATURE; HIGH-TEMPERATURE ANNEALING; PT ELECTRODE; SWITCHING CYCLES; THIN-FILM CAPACITORS;

ANNEALING; CAPACITORS; FERROELECTRICITY; PLATINUM; SILICON COMPOUNDS; THIN FILM CIRCUITS;

FERROELECTRIC FILMS;

EID: 79957938613     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1502010     Document Type: Article

References (8)

1. J. F. Scott, Ferroelectric Memories (Springer, Berlin, 2000), p. 153.
2. S.-K. Hong, B. Yang, S. H. Oh, Y. M. Ang, N. S. Kang, C. S. Hwang, and O. S. Kwon, J. Appl. Phys. 89, 8011 (2001). jap JAPIAU 0021-8979
3. M. Grossmann, D. Bolten, O. Lohse, U. Boettger, R. Waser, and S. Tiedke, Appl. Phys. Lett. 77, 1894 (2000). apl APPLAB 0003-6951
4. M. Dawber and J. F. Scott, Appl. Phys. Lett. 76, 1060 (2000); apl APPLAB 0003-6951
5. 76, 3655 (2000). apl APPLAB 0003-6951
6. J. F. Scott and C. A. Paz de Araujo, Science 246, 1400 (1989). sci SCIEAS 0036-8075
7. A. C. Palanduz and D. M. Smyth, J. Electroceram. 5, 21 (2000). jek JOELFJ 1385-3449
8. B. H. Park, B. S. Kang, S. D. Bu, T. W. Noh, J. Lee, and W. Jo, Nature (London) 401, 682 (1999). nat NATUAS 0028-0836