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Volumn 257, Issue 17, 2011, Pages 7689-7692
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Tailoring the wettability of patterned silicon surfaces with dual-scale pillars: From hydrophilicity to superhydrophobicity
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Author keywords
Hydrophilicity; Patterned silicon surface; Superhydrophobicity; Wettability
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Indexed keywords
HYDROPHILICITY;
HYDROPHOBICITY;
NANOSENSORS;
REACTIVE ION ETCHING;
SILICON;
WETTING;
ELECTROMECHANICAL SYSTEMS;
HYDROPHILIC SURFACES;
MICRO-PILLARS;
PATTERNED SILICON;
SILICON SURFACES;
SUPER-HYDROPHOBIC SURFACES;
SUPERHYDROPHOBICITY;
WATER DROP;
SILICON DETECTORS;
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EID: 79957512271
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2011.04.009 Document Type: Article |
Times cited : (47)
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References (26)
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