Recent trends and developments of microwave discharges

Journal De Physique. IV : JP

Volumn 8, Issue 7, 1998, Pages

  Marec, J ^a   Leprince, P ^a  

^a UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MICROWAVES; PLASMA SOURCES; SURFACE CLEANING; SURFACE TREATMENT;

MATERIALS PROCESSING; MICROWAVE DISCHARGES; MICROWAVE PLASMA; PLASMA PROCESSING;

PLASMAS;

EID: 0032180393     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1998701     Document Type: Article

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