Impact of three-dimensional lateral current flow on ultrashallow spreading resistance profiles

Applied Physics Letters

Volumn 80, Issue 13, 2002, Pages 2407-2409

  Clarysse, T ^a   Caymax, M ^a   Vandervorst, W ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE SURFACES; DEEP STRUCTURE; DEPTH PROFILE; DOPANT PROFILE; ELECTRICAL CHARACTERIZATION; LATERAL CURRENTS; MEASUREMENT TOOLS; SOFTWARE CORRECTION; SPREADING RESISTANCE; SPREADING RESISTANCE PROBES; SPREADING RESISTANCE PROFILE; SUB-100 NM;

MEASUREMENTS; THREE DIMENSIONAL;

IMPACT RESISTANCE;

EID: 79956040755     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1464224     Document Type: Article

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