Sheet resistance corrections for spreading resistance ultrashallow profiling

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 390-396

  Clarysse, T ^a   Vandervorst, W ^a   Pawlik, M ^b  

^a IMEC   (Belgium)

^b SAS   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000886241     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588481     Document Type: Article

References (13)

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