Preparation of polycrystalline boron carbide thin films at room temperature by pulsed ion-beam evaporation

Applied Physics Letters

Volumn 80, Issue 7, 2002, Pages 1153-1155

  Suematsu, H ^a   Kitajima, K ^a   Suzuki, T ^a   Jiang, W ^a   Yatsui, K ^a   Kurashima, K ^b   Bando, Y ^b  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC DEVICE; POLYCRYSTALLINE; PULSED ION-BEAM EVAPORATION; ROOM TEMPERATURE;

BORON; BORON CARBIDE; EVAPORATION; ION BEAMS; PHASE TRANSITIONS; THIN FILMS;

FILM PREPARATION;

EID: 79956012021     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1449539     Document Type: Article

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