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Volumn 80, Issue 23, 2002, Pages 4363-4365
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Channeling of low energy heavy ions: Er in Si〈111〉
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Author keywords
[No Author keywords available]
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Indexed keywords
ANGULAR DEPENDENCE;
BEAM DIRECTION;
CRITICAL ANGLES;
CRYSTALLINE AXIS;
CRYSTALLINE QUALITY;
LOW ENERGY HEAVY IONS;
POST-IMPLANTATION;
PROJECTED RANGE;
SI (1 1 1);
SILICIDE LAYERS;
SUBSTRATE TEMPERATURE;
THEORETICAL PREDICTION;
CRYSTALLINE MATERIALS;
ION BEAMS;
SILICIDES;
ERBIUM;
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EID: 79955985813
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1485128 Document Type: Article |
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Times cited : (12)
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References (9)
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