Study on a few α-disulfone compounds as photoacid generators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7972, Issue , 2011, Pages

  Guo, Dongfang ^a   Liu, Juan ^a   Wang, Liyuan ^a  

^a BEIJING NORMAL UNIVERSITY   (China)

Author keywords

disulfone compounds; Chemically amplified; Deep U V; Photoacid generators; Photolysis quantum yield; Positive photoresist

Indexed keywords

CHEMICALLY AMPLIFIED; DEEP U V; DISULFONE; PHOTOACID GENERATORS; POSITIVE PHOTORESIST;

ABSORPTION; CHLORINE COMPOUNDS; LIGHT ABSORPTION; LIGHT SOURCES; MERCURY (METAL); NITRIC ACID; ORGANIC SOLVENTS; PHOTOLYSIS; PHOTORESISTS; PYROLYSIS; QUANTUM YIELD; SURFACE TREATMENT;

PHOTORESISTORS;

EID: 79955924506     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.879296     Document Type: Conference Paper

References (7)

1. Toshiaki, A., Yoshimasa, A., Akira, U., "Application of silyl ether polymers for chemical amplication system," Journal of Photopolymer Science and Technology, 3(3), 389-400 (1990)
2. Masamitsu, S., Masahiro, T., "Photoacid and photobase generators: chemistry and application to polymeric materals," Prog. Polym. Sci, 21, 1-45 (1996)
3. Haibo, S., "Synthesis of 1-benzoyl-2-phenylsulfonyl-hydrazine derivatives," Chinese Journal of Synthenic Chemistry, 15(3), 372-373 (2007)
4. Tatsuya, T., Jun S., Tohru F., "N,N'-Ditosylhydrazine: a convenient reagent for facile synthesis of diazoacetates," Organic Letters, 9(16), 3197-3197 (2007)
5. Andrew, T., Maioli, Jean-Pierre A., "Oxidation of 1,2-bis-(benzenesulfonyl)hydrazine to 1,2-diphenylsulfone," Tetrahedron Letters, 36(8), 1221-1222 (1995)
6. 2)," Sythesis, (5), 490-496 (1993)
7. Pengfei, L., Baolei W., Ning M., "Synthesis and characterization of new 4-(substituted pyrimidin-2-yl)-1-(substituted benzenesulfonyl) semicarbazides," Youji Huaxue, 25(9), 1057-1061 (2005)