메뉴 건너뛰기




Volumn 7972, Issue , 2011, Pages

Developing directly photodefinable substrate guiding layers for block copolymer directed self-assembly (DSA) patterning

Author keywords

Chemical epitaxy; Photodefinable substrate; Ps b PMMA

Indexed keywords

COPOLYMER FILMS; CROSS-LINKABLE; DIFFERENT SUBSTRATES; DIRECTED SELF-ASSEMBLY; GUIDING LAYER; LITHOGRAPHIC PATTERNS; LOW MOLECULAR WEIGHT; MODIFIED SURFACES; MULTI-STEP; NEW MATERIAL; OXYGEN PLASMA EXPOSURE; PATTERNED SUBSTRATES; PHASE DOMAIN; PHOTO-DEFINABLE; POLY(HYDROXYSTYRENE); POLYMER RESINS; PS-B-PMMA; RELIEF PATTERNS; SOFT X-RAY; SUBSTRATE FILMS; TEMPLATED SURFACE; THERMAL-ANNEALING;

EID: 79955905362     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.894702     Document Type: Conference Paper
Times cited : (8)

References (10)
  • 2
    • 0348046829 scopus 로고    scopus 로고
    • Block copolymers-designer soft materials
    • Bates, F. S.; Fredrickson, G. H., "Block copolymers-designer soft materials," PHYSICS TODAY 52(2), 32 (1999).
    • (1999) Physics Today , vol.52 , Issue.2 , pp. 32
    • Bates, F.S.1    Fredrickson, G.H.2
  • 3
    • 33847086243 scopus 로고
    • Theory of microphase separation in block copolymers
    • (Washington, DC, United States)
    • Leibler, L., "Theory of microphase separation in block copolymers," Macromolecules (Washington, DC, United States) 13, 1602 (1980).
    • (1980) Macromolecules , vol.13 , pp. 1602
    • Leibler, L.1
  • 4
    • 4444340443 scopus 로고
    • Block copolymer thermodynamics: Theory and experiment
    • Bates, F. S.; Fredrickson, G. H., "Block copolymer thermodynamics: theory and experiment," Annu. Rev. Phys. Chem. 41, 525 (1990).
    • (1990) Annu. Rev. Phys. Chem. , vol.41 , pp. 525
    • Bates, F.S.1    Fredrickson, G.H.2
  • 6
    • 0035800414 scopus 로고    scopus 로고
    • Graphoepitaxy of spherical domain block copolymer films
    • DOI 10.1002/1521-4095(200108)1 3:15<1152::AID-ADMA1152>3.0.CO;2-5
    • Segalman, R. A.; Yokoyama, H.; Kramer, E., "Graphoepitaxy of spherical domain block copolymer films," J. Adv. Mater. 13, (15), 1152-1155 (2001). (Pubitemid 32798071)
    • (2001) Advanced Materials , vol.13 , Issue.15 , pp. 1152-1155
    • Segalman, R.A.1    Yokoyama, H.2    Kramer, E.J.3
  • 7
    • 64549147426 scopus 로고    scopus 로고
    • Effect of composition of substrate-modifying random copolymers on the orientation of symmetric and asymmetric diblock copolymer domains
    • P., G.
    • Han, E.; Stuen, K. O.; La, Y.; Nealey, P. F.; P., G., "Effect of composition of substrate-modifying random copolymers on the orientation of symmetric and asymmetric diblock copolymer domains," Macromolecules 41, 9090-9097 (2008).
    • (2008) Macromolecules , vol.41 , pp. 9090-9097
    • Han, E.1    Stuen, K.O.2    La, Y.3    Nealey, P.F.4
  • 9
    • 0020799612 scopus 로고
    • Poly(p-tert-butoxycarbonyloxystyrene): A convenient precursor to p-hydroxystyrene resins
    • DOI 10.1016/0032-3861(83)90150-7
    • Fréchet, J. M. J.; Eichler, E.; Ito, H.; Willson, C. G., "Poly(p-tert-butoxycarbonyloxystyrene): a convenient precursor to p-hydroxystyrene resins", Polymer 24, (8), 995-1000 (1983). (Pubitemid 13589229)
    • (1983) Polymer , vol.24 , Issue.8 , pp. 995-1000
    • Frechet, J.M.J.1    Eichler, E.2    Ito, H.3    Wilson, C.G.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.