On-chip nanostructures for polarization imaging and multispectral sensing using dedicated layers of modified CMOS processes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7946, Issue , 2011, Pages

  Junger, Stephan ^a   Tschekalinskij, Wladimir ^a   Verwaal, Nanko ^a   Weber, Norbert ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

Author keywords

CMOS process; Color sensors; Image sensors; Nanophotonics; Plasmons; Polarization sensors; Sub wavelength apertures; Wire grid polarizer

Indexed keywords

CMOS PROCESSS; COLOR SENSORS; POLARIZATION SENSORS; SUBWAVELENGTH APERTURES; WIRE GRID POLARIZER;

CMOS INTEGRATED CIRCUITS; DISPLAY DEVICES; FINITE DIFFERENCE TIME DOMAIN METHOD; IMAGE SENSORS; LIGHT TRANSMISSION; NANOPHOTONICS; NANOSTRUCTURES; OPTICAL INSTRUMENTS; SENSORS; TIME DOMAIN ANALYSIS; WIRE;

POLARIZATION;

EID: 79955782241     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.874785     Document Type: Conference Paper

References (6)

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