Nano-grass polyimide-based humidity sensors

Sensors and Actuators, B: Chemical

Volumn 154, Issue 1, 2011, Pages 2-8

  Lee, Hyemin ^a   Lee, Sungjun ^a   Jung, Seungwon ^a   Lee, Junghoon ^a,b  

^a Seoul National University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Humidity sensor; Nano grass; Oxygen plasma; Polyimide

Indexed keywords

CAPACITIVE-TYPE; CARBONYL GROUPS; DIELECTRIC SENSING; DUBININ EQUATIONS; HIGH SENSITIVITY; KEY PERFORMANCE INDEX; MICROHEATER; NANO-GRASS; OXYGEN PLASMA; OXYGEN PLASMA TREATMENTS; QUICK RESPONSE; RAPID ADSORPTION; RELATIVE HUMIDITIES; RELATIVE HUMIDITY SENSORS; SENSING AREAS; SENSING MATERIAL; STABILITY TESTS; SURFACE-TO-VOLUME RATIO; THEORETICAL MODELS; TOTAL RESPONSE; WATER MOLECULE; XPS ANALYSIS;

ADSORPTION; ATMOSPHERIC HUMIDITY; CARBONYLATION; DESORPTION; DRIERS (MATERIALS); HUMIDITY SENSORS; MORPHOLOGY; OXYGEN; PLASMA APPLICATIONS; PLASMAS; POLYIMIDES; SURFACES;

NANOSENSORS;

EID: 79955661160     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.11.054     Document Type: Conference Paper

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