A micro force sensor based on a single ZnO belt coated with chromium film

Journal of Nanoscience and Nanotechnology

Volumn 10, Issue 11, 2010, Pages 7250-7253

  Ren, Xiaoyan ^a,b   Yang, Xing ^a   Zhou, Zhaoying ^a   Li, Jinming ^a   Liu, Jing ^b  

^a TSINGHUA UNIVERSITY   (China)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Micro force sensor; Piezoresistance; Ultra thin Cr film; ZnO belt

Indexed keywords

BENDING FORCE; CHROMIUM FILM; CR FILM; DIELECTROPHORESIS; FORCE SENSING; LINEAR RELATIONSHIPS; MICRO-FORCE SENSORS; NANO SCALE; NANOSIZED STRUCTURES; PIEZORESISTANCE; PIEZORESISTIVE EFFECTS; ULTRA THIN CR FILM; ULTRA-THIN; ZNO;

BENDING (DEFORMATION); CHROMIUM; ELECTROPHORESIS; ZINC OXIDE;

NANOSENSORS;

EID: 79955529389     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2010.2812     Document Type: Conference Paper

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