Polarization Analyzing Image Sensor with On-Chip Metal Wire Grid Polarizer in 65-nm Standard Complementary Metal Oxide Semiconductor Process

Japanese Journal of Applied Physics

Volumn 50, Issue 4 PART 2, 2011, Pages

  Shishido, Sanshiro ^a   Noda, Toshihiko ^a   Sasagawa, Kiyotaka ^a   Tokuda, Takashi ^a   Ohta, Jun ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS PROCESSS; COMPLEMENTARY METAL OXIDE SEMICONDUCTOR PROCESS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; DESIGN RULES; EXTINCTION RATIOS; FABRICATED SENSORS; FEATURE SIZES; FINE STRUCTURES; METAL WIRES; ON-CHIP METALS; PIXEL CROSS-TALK; SENSOR CHIPS; VISIBLE LIGHT;

CMOS INTEGRATED CIRCUITS; FABRICATION; IMAGE SENSORS; LIGHT EXTINCTION; METALLIC COMPOUNDS; MOS DEVICES; OPTICAL INSTRUMENTS; POLARIZATION; POSITION MEASUREMENT; TRANSISTORS; WIRE;

METALS;

EID: 79955460680     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.04DL01     Document Type: Article

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