Fabrication of metallic nanocones by induced deposition of etch masks and ion milling

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2247-2250

  Fleischer, M ^a   Weber Bargioni, A ^b   Cabrini, S ^b   Kern, D P ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Cone; Electron beam induced deposition; Gold; Ion milling; Nanocone; Optical antenna

Indexed keywords

ARGON ION MILLING; DIFFERENT SIZES; ELECTRON BEAM INDUCED DEPOSITION; ETCH MASK; FOCUSED ELECTRON BEAM INDUCED DEPOSITION; INDUCED DEPOSITION; ION MILLING; NANO-CONES; NANOCONE; NON-PLANAR SURFACES; OPTICAL ANTENNAS;

ELECTRON BEAMS; IONS; MILLING (MACHINING);

GOLD DEPOSITS;

EID: 79955459866     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.090     Document Type: Conference Paper

References (10)

1. T.I. Kim, J.H. Kim, S.J. Son, and S.M. Seo Nanotechnology 19 2008 295302
2. B. Zeeb, S. Jäger, C. Schäfer, P. Nill, A.J. Meixner, D.P. Kern, and M. Fleischer J. Vac. Sci. Technol. B 28 2010 C6O34
3. M. Fleischer, C. Stanciu, F. Stade, J. Stadler, K. Braun, A. Heeren, M. Häffner, D.P. Kern, and A.J. Meixner Appl. Phys. Lett. 93 2008 111114
4. A. Mohammadi, F. Kaminski, V. Sandoghdar, and M. Agio J. Phys. Chem. C 114 2010 7372
5. J.M. Kontio, J. Simonen, J. Tommila, and M. Pessa Microelectron. Eng. 87 2010 1711
6. F. Stade, A. Heeren, M. Fleischer, and D.P. Kern Microelectron. Eng. 84 2007 1589
7. M. Fleischer, F. Stade, A. Heeren, M. Häffner, K. Braun, C. Stanciu, R. Ehlich, J.K.H. Hörber, A.J. Meixner, and D.P. Kern Microelectron. Eng. 86 2009 1219
8. M. Fleischer, D. Zhang, K. Braun, S. Jäger, R. Ehlich, M. Häffner, C. Stanciu, J.K.H. Hörber, A.J. Meixner, and D.P. Kern Nanotechnology 21 2010 065301
9. I. Utke, P. Hoffmann, and J. Melngailis J. Vac. Sci. Technol. B 26 2008 1197
10. A. Weber-Bargioni, A.M. Schwartzberg, M. Schmidt, B. Harteneck, D.F. Ogletree, P.J. Schuck, and S. Cabrini Nanotechnology 21 2010 065306