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Volumn 50, Issue 4 PART 2, 2011, Pages

Advanced organic polymer for the aggressive scaling of low-kappa; materials

a IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AGGRESSIVE SCALING; CU LINES; CURRENT VOLTAGE; DIELECTRIC SPACINGS; ORGANIC POLYMER MATERIAL; TIME DEPENDENT DIELECTRIC BREAKDOWN;

DEGRADATION; ORGANIC POLYMERS; SILICON COMPOUNDS;

DIELECTRIC MATERIALS;

EID: 79955456904 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.50.04DB01 Document Type: Article

Times cited : (16)

References (9)

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