Impact of vane size and separation on radiometric forces for microactuation

Journal of Applied Physics

Volumn 109, Issue 7, 2011, Pages

  Gimelshein, Natalia ^a   Gimelshein, Sergey ^a   Ketsdever, Andrew ^b   Selden, Nathaniel ^c  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF COLORADO   (United States)

^c Selden Consulting Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING HOLE; KINETIC APPROACH; KNUDSEN NUMBERS; MICROACTUATION; ORDER OF MAGNITUDE; RADIOMETRIC FORCES;

METEOROLOGICAL INSTRUMENTS; RADIOMETERS; SIZE SEPARATION;

RADIOMETRY;

EID: 79955396022     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3567298     Document Type: Conference Paper

References (22)

1. W. A. Johnson and L. K. Warne, J. Microelectromech. Syst. 4, 49 (1995). 10.1109/84.365370
2. E. K. Chan and R. W. Dutton, J. Microelectromech. Syst. 9, 321 (2000). 10.1109/84.870058
3. H. Kueppers, T. Leuerer, U. Schnakenberg, W. Mokwa, M. Hoffmann, T. Schneller, U. Boettger, and R. Waser, Sens. Actuators 97-98, 680 (2002). 10.1016/S0924-4247(01)00850-0 (Pubitemid 34758782)
4. M. Roemer, T. Kurzenknabe, E. Oesterschulze, and N. Nicoloso, Anal. Bioanal. Chem. 373, 754 (2002). 10.1007/s00216-002-1414-8 (Pubitemid 34994811)
5. F. C. M. Van De Pol, D. G. J. Wonnink, M. Elwenspoek, and J. H. J. Fluitman, Sens. Actuators 17, 139 (1989). 10.1016/0250-6874(89)80073-3
6. E. P. Muntz, G. R. Shiflett, and D. A. Erwin, J. Microelectromech. Syst. 1, 155 (1992). 10.1109/84.186395
7. D. C. Wadsworth and E. P. Muntz, J. Microelectromech. Syst. 5, 59 (1996). 10.1109/84.485217
8. A. Passian, A. Wig, F. Meriaudeau, T. Ferrell, and T. Thundat, J. Appl. Phys. 92, 6326 (2002). 10.1063/1.1515108 (Pubitemid 35445648)
9. J. S. Heo and Y. K. Hwang, J. Mech. Sci. Technol. 19, 664 (2005). 10.1007/BF02916188
10. N. Selden, C. Ngalande, S. Gimelshein, E.P. Muntz, A. Alexeenko, and A. Ketsdever, Phys. Rev. E 79, 041201 (2009). 10.1103/PhysRevE.79.041201
11. J. C. Maxwell, Philos. Trans. R. Soc. London 170, 231 (1879). 10.1098/rstl.1879.0067
12. L. B. Loeb, The Kinetic Theory of Gases, 3rd ed. (Dover, New York, 1961).
13. N. Selden, N. Gimelshein, S. Gimelshein, and A. Ketsdever, Phys. Fluids 21, 073101 (2009). 10.1063/1.3187932
14. N. Selden, C. Ngalande, N. Gimelshein, S. Gimelshein, and A. Ketsdever, J. Fluid Mech. 634, 419 (2009). 10.1017/S0022112009007976
15. M. Young, S. Keith, and A. Pancotti, AIAA Paper 2009, 4805 (2009).
16. P. L. Bhatnagar, E. P. Gross, and M. Krook, Phys. Rev. 94, 511 (1954). 10.1103/PhysRev.94.511
17. L. H. Holway, Proceedings of the IV International Symposium on Rarefied Gas Dynamics (Academic, New York, 1966), pp. 193-215.
18. L. Mieussens, J. Comp. Phys. 162, 429 (2000). 10.1006/jcph.2000.6548
19. D. C. Wadsworth, N. E. Gimelshein, S. F. Gimelshein, and I. J. Wysong, Proceedings of the XXVI International Symposium on Rarefied Gas Dynamics, Kyoto, Japan, 21-25 July 2008.
20. G. A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows (Clarendon, Oxford, 1994).
21. G. D. West, Proc. Phys. Soc. London 32, 166 (1920). 10.1088/1478-7814/32/ 1/320
22. O. Reynolds, Philos. Trans. R. Soc. London 166, 725 (1876). 10.1098/rstl.1876.0028