Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 648-651

  Dagamseh, A M K ^a   Lammerink, T S J ^a   Sanders, R ^a   Wiegerink, R J ^a   Krijnen, G J M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAY ELEMENTS; DEEP TRENCH ISOLATION; DIPOLE FIELDS; DIPOLE SOURCES; FLOW-SENSORS; FLOWFIELD VISUALIZATION; HAIR ARRAYS; HIGH RESOLUTION; HUMAN LIVES; SENSING MECHANISM; SILICON-ON-INSULATORS; WAFER-SCALE;

FREQUENCY ALLOCATION; FREQUENCY DIVISION MULTIPLEXING; MECHANICAL ENGINEERING; MECHANICS; MEMS; PATTERN RECOGNITION; REACTIVE ION ETCHING; SENSOR ARRAYS; SILICON WAFERS; THREE DIMENSIONAL; VISUALIZATION;

SILICON ON INSULATOR TECHNOLOGY;

EID: 79953795555     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734508     Document Type: Conference Paper

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