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Volumn , Issue , 2011, Pages 396-399
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Contact and sheet resisstances of carbon nanotube forest in gas sensing applications
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Author keywords
[No Author keywords available]
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Indexed keywords
FOUR-POINT PROBE METHOD;
GAS SENSING;
GAS SENSING APPLICATIONS;
GAS SENSORS;
KELVIN METHOD;
MEASUREMENT RESULTS;
RESPONSE TIME;
SYSTEMATIC STUDY;
TRANSFER LENGTH METHODS;
VERTICALLY ALIGNED CARBON NANOTUBE;
CARBON NANOTUBES;
CHEMICAL DETECTION;
ELECTRIC RESISTANCE;
MECHANICAL ENGINEERING;
MECHANICS;
MEMS;
REACTIVE ION ETCHING;
SHEET RESISTANCE;
GAS DETECTORS;
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EID: 79953793622
PISSN: 10846999
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/MEMSYS.2011.5734445 Document Type: Conference Paper |
Times cited : (7)
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References (5)
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