Planar mems supercapacitor using carbon nanotube forests

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 587-590

  Jiang, Y Q ^a   Zhou, Q ^a   Lin, L ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGING/DISCHARGING; CONDUCTIVE SUBSTRATES; CYCLING STABILITY; ENERGY HARVESTER; HIGH ELECTRICAL CONDUCTIVITY; INTERDIGITAL ELECTRODE; METAL ELECTRODES; METAL STACKS; NANOTUBE FORESTS; ON-CHIP CAPACITORS; PROTOTYPE DEVICES; PULSE POWER; SPECIFIC CAPACITANCE; SUPER CAPACITOR; VERTICALLY ALIGNED CARBON NANOTUBE;

CAPACITANCE; CAPACITORS; ELECTRIC CONDUCTIVITY; ELECTRIC POWER SYSTEMS; ELECTRODES; ELECTROLYTIC CAPACITORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS;

CARBON NANOTUBES;

EID: 65949091812     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805450     Document Type: Conference Paper

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