High pressure pump as lab on chip component for micro-fluidic integrated system

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1139-1142

  Hiraoka, M ^a,b   Fiorini, P ^b   Yamashita, I ^a   Van Hoof, C ^b   Op De Beeck, M ^b  

^a PANASONIC CORPORATION   (Japan)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE POLYMER; ELECTROLYTE LAYERS; HIGH PRESSURE PUMPS; INTEGRATED SYSTEMS; LAB ON CHIP; LAB-ON-CHIP DEVICES; PRESSURE INCREASE;

ACTUATORS; ATMOSPHERIC PRESSURE; INTEGRATED OPTICS; MECHANICAL ENGINEERING; MECHANICS; PUMPS; REACTIVE ION ETCHING;

MEMS;

EID: 79953793612     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734631     Document Type: Conference Paper

References (7)

1. S. Wilson et al. "New materials for micro-scale sensors and actuators an engineering review" Materials Science and Engineering R, vol. 56, pp. 1-129, 2007. (Pubitemid 47053883)
2. E. Smela and N. Gadegaard "Volume change in polypyrrole studied by atomic force microscopy" J. Physical Chemistry B, vol. 105, pp. 9395-9405, 2001. (Pubitemid 35338662)
3. T. Zama, N. Tanaka, W. Takashima, K. Kaneto, "Fast and large stretching bis(trifluoromethylsulfonyl)imide (TFSI)-doped polypyrrole actuators and their applications to small devices", Polymer Journal, vol. 38, pp. 669-677, 2006. (Pubitemid 44342755)
4. K. Yamato, W. Takashima, K. Kaneto, "Stability of electrochemomechanical strains in polypyrrole films using ionic liquids", Synthetic Metals, vol. 159, pp. 839-842, 2009.
5. L. Bay, K. West, P. Sommer-Larsen, S. Skaarup, M. Benslimane, "A conducting polymer artificial muscle with 12 % liner strain" Advanced Materials, vol. 15, pp. 310-313, 2003.
6. M. Kaneko, M. Fukui, W. Takashima, K. Kaneto "Electrolyte and strain dependences of chemomechanical deformation of polyaniline film" Synthetic Metals, vol. 84, pp. 795-796, 1997. (Pubitemid 127401603)
7. W. Lu, et. al "Use of ionic liquids for pi-conjugated polymer electrochemical devices", science, vol. 297, pp. 983-987, 2002 (Pubitemid 34856026)