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Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1209-1212

A large-deflection high-force micro electromagnetic hydraulic latex membrane actuator for fluid manipulation in micro channels

(3) Park, Jung Woo b Yang, Jung Hoon a Kim, Hanseup a

a Department of Electrical and Computer Engineering (United States)

b UNIVERSITY OF UTAH (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION FORCE; ELECTROMAGNETIC FORCES; LARGE DEFLECTION; LEAK-FREE; LIQUID FLOW; MEMBRANE ACTUATORS; MEMBRANE DEFLECTIONS; MICROFLUIDIC CHANNEL; ON CHIPS; OPERATION VOLTAGE; PRESSURIZED GAS; SYRINGE PUMPS;

ACTUATORS; CYLINDERS (SHAPES); DEFLECTION (STRUCTURES); ELECTROMAGNETISM; FLUIDIC DEVICES; GAS CYLINDERS; HYDRAULICS; LATEXES; MECHANICAL ENGINEERING; MECHANICS; MEMS; MICROFLUIDICS; MICROOPTICS; REACTIVE ION ETCHING;

MEMBRANES;

EID: 79953790560 PISSN: 10846999 EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/MEMSYS.2011.5734649 Document Type: Conference Paper

Times cited : (5)

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