Nanogenerators for self-powering nanosystems and piezotronics for smart MEMS/NEMS

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 115-120

  Wang, Zhong Lin ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BODY MOTIONS; CENTRAL SYMMETRY; CHARGE TRANSPORT; CMOS FIELD-EFFECT TRANSISTORS; ELECTRONIC DEVICE; EXTERNAL LOADS; GATE VOLTAGES; LOGIC UNIT; MECHANICAL ENERGIES; MEMS/NEMS; OUTPUT POWER; PIEZOELECTRIC POTENTIAL; POTENTIAL APPLICATIONS; SELF-POWERING; SMART MEMS; SONIC WAVES; THIN SHEET; TRANSIENT FLOW; ZNO;

CRYSTAL SYMMETRY; ENERGY HARVESTING; FIELD EFFECT TRANSISTORS; GALLIUM NITRIDE; MECHANICAL ENGINEERING; MECHANICS; MEMS; REACTIVE ION ETCHING; STRAIN; ZINC OXIDE;

NANOSYSTEMS;

EID: 79953773410     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734375     Document Type: Conference Paper

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