Toward wafer-scale fabrication and 3D integration of micro-solid oxide fuel cells for portable energy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7679, Issue , 2010, Pages

  Lai, Bo Kuai ^a   Johnson, Alex C ^a   Tsuchiya, Masaru ^a   Ramanathan, Shriram ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

Cathodes; Electrolyte; Lanthanum Strontium Cobalt Ferrite; Solid Oxide Fuel Cell; Sputtering; Stack; Thin Film; Yttria stabilized Zirconia

Indexed keywords

3-D INTEGRATION; BIPOLAR SEPARATORS; CATHODE MATERIALS; CURRENT COLLECTOR; FLOW CHANNELS; FUEL CELL DEVICES; LANTHANUM STRONTIUM COBALT FERRITE; ON CHIPS; OUTPUT VOLTAGES; PORTABLE ENERGY; PT ANODES; PT CATHODE; REPEATING UNIT; RESISTIVE LOSS; SCALING-UP; SOFC STACK; STACK; THROUGH SILICON VIAS; TWO-COMPONENT; VOLTAGE OUTPUT; WAFER SCALE FABRICATION; WAFER-SCALE PROCESSING;

COBALT; FABRICATION; FERRITE; FERRITES; LANTHANUM; LANTHANUM ALLOYS; LANTHANUM OXIDES; NANOTECHNOLOGY; PLATINUM; SENSORS; SILICON WAFERS; SOLID OXIDE FUEL CELLS (SOFC); STRONTIUM; THIN FILMS; YTTRIA STABILIZED ZIRCONIA; YTTRIUM ALLOYS; ZIRCONIA;

CATHODES;

EID: 79953759847     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.846916     Document Type: Conference Paper

References (22)

1. Jankowski, A. F., Hayes, J. P., Graff, R. T., and Morse, J. D., "Microfabricated Thin-Film Fuel Cells For Portable Power Applications," Mat. Res. Soc. Symp. Proc., 730, V4.2.1 (2002).
2. Litzelman, S. J., Hertz, J. L., Jung, W., and Tuller, H. L., "Opportunities and Challenges in Materials Development for Thin Film Solid Oxide Fuel Cells," Fuel Cells 8, 294-302 (2008).
3. Bieberle-Hutter, A., Beckel, D., Infortuna, A., Muecke, U. P., Rupp, J. L. M., Gauckler, L. J., Rey-Mermet, S., Muralt, P., Bieri, N. R., Hotz, N., Stutz, M. J., Poulikakos, D., Heeb, P., Muller, P., Bernard, A., Gmur, R., and Hocker, T., "A micro-solid oxide fuel cell system as battery replacement," J. Power Sources 177, 123-130 (2008).
4. Huang, H., Nakamura, M., Su, P. C., Fasching, R., Saito, Y., and Prinz, F. B., "High-performance ultrathin solid oxide fuel cells for low-temperature operation," J. Electrochem. Soc. 154, B20-B24 (2007).
5. Jiang, X. R., Huang, H., Prinz, F. B., and Bent, S. F., "Application of atomic layer deposition of platinum to solid oxide fuel cells," Chem. Mater. 20, 3897-3905 (2008).
6. Su, P.-C., Chao, C.-C., Shim, J. H., Fasching, R., and Prinz, F. B., "Solid Oxide Fuel Cell with Corrugated Thin Film Electrolyte," Nano Lett. 8, 2289-2292 (2008).
7. Ignatiev, A., Chen, X., Wu, N. J., Lu, Z. G., and Smith, L., "Nanostructured thin solid oxide fuel cells with high power density," Dalton Transac. 40, 5501-5506 (2008).
8. 3 cathodes and yttria-doped zirconia electrolyte films," J. Power Sources 186, 252-260 (2009).
9. Lai, B.-K., Kerman, K., and Ramanathan, S., "On the role of ultra-thin oxide cathode synthesis on the functionality of micro-solid oxide fuel cells: Structure, stress engineering and in-situ observation of fuel cell membranes during operation," J. Power Sources (2010), doi: 10.1016/j.jpowsour.2010.02.079.
10. Shao, Z. P., and Haile, S. M., "A high-performance cathode for the next generation of solid-oxide fuel cells," Nature 431, 170-173 (2004).
11. Steele, B. C. H., and Heinzel, A., "Materials for fuel-cell technologies," Nature 414, 345-352 (2001).
12. Johnson, A., Baclig, A., Harburg, D. V., Lai, B.-K., and Ramanathan, S., "Fabrication and electrochemical performance of thin-film solid oxide fuel cells with large area nanostructured membranes," J. Power Sources 195, 1149-1155 (2010).
13. Srikar, V. T., Turner, K. T., Ie, T. Y. A., and Spearing, S. M., "Structural design considerations for micromachined solid-oxide fuel cells," J. Power Sources 125, 62-69 (2004).
14. Tang, Y. H., Stanley, K., Wu, J., Ghosh, D., and Zhang, J. J., "Design consideration of micro thin film solid-oxide fuel cells," J. Micromech. Microeng. 15, S185-S192 (2005).
15. Fergus, J. W., "Materials challenges for Solid-oxide, fuel cells," JOM 59(12), 56-62 (2007).
16. Singhal, S. C., "Solid oxide fuel cells: status, challenges and opportunities," Industrial Ceramics 28, 53-59 (2008).
17. Lai, B.-K., Xiong, H., Tsuchiya, M., Johnson, A. C., and Ramanathan, S., "Microstructure and Microfabrication Considerations for Self-Supported On-Chip Ultra-Thin Micro-Solid Oxide Fuel Cell Membranes," Fuel Cells, 9, 699-710 (2009).
18. 3-δ) films synthesis by RF-sputtering and temperature-dependent conductivity studies," J. Power Sources, 186, 115-122 (2009).
19. Lai, B.-K., Johnson, A., Xiong, H., Ko, C., and Ramanathan, S., [Exploratory studies of on-chip solid oxide fuel cells incorporating ultra-thin nanostructured platinum and cerium oxide films as anode components] WILEY-IEEE Press, (2010).
20. Tsuchiya, M., Lai, B.-K., Johnson, A. C., and Ramanathan, S., "Photon-assisted synthesis of ultra-thin yttria-doped zirconia membranes: Structure, variable temperature conductivity and micro-fuel cell devices," J. of Power Sources, 195, 994-1000 (2010).
21. Dawber, M., Rabe, K. M., and Scott, J. F., "Physics of thin-film ferroelectric oxides," Rev. Mod. Phys. 77, 1083 (2005).
22. Wang, X. H., Huang, H., Holme, T., Tian, X., and Prinz, F. B., "Thermal stabilities of nanoporous metallic electrodes at elevated temperatures," J. Power Sources 175, 75-81 (2008).