High-precision combinatorial deposition of micro particle patterns on a microelectronic chip

Aerosol Science and Technology

Volumn 45, Issue 1, 2011, Pages 65-74

  Loffler, F ^a,b   Wagner, J ^a,b   Konig, K ^a,b   Markle, F ^a,b   Fernandez, S ^a   Schirwitz, C ^a   Torralba, G ^b   Hausmann, M ^b   Lindenstruth, V ^c   Bischoff, F R ^a   Breitling, F ^d   Nesterov, A ^d  

^a GERMAN CANCER RESEARCH CENTER DKFZ   (Germany)

^b UNIVERSITY OF HEIDELBERG   (Germany)

^c FRANKFURT INSTITUTE FOR ADVANCED STUDIES   (Germany)

^d KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS CHIPS; COMBINATORIAL DEPOSITION; CONTAMINATION-FREE; EXPERIMENTAL SETUP; HIGH QUALITY; HIGH-PRECISION; INCOMPRESSIBLE NAVIER STOKES EQUATIONS; MICRO PARTICLES; MICROELECTRONIC CHIP; NUMERICAL SIMULATION; SIMULATION RESULT;

COMPUTER SIMULATION; MICROELECTRONICS; NAVIER STOKES EQUATIONS;

POISSON EQUATION;

POLYMER;

AEROSOL; ARTICLE; COMPUTER SIMULATION; ELECTRIC FIELD; ELECTRIC POTENTIAL; MATHEMATICAL ANALYSIS; PARTICLE SIZE; PRIORITY JOURNAL; STATIC ELECTRICITY;

EID: 79953720308     PISSN: 02786826     EISSN: 15217388     Source Type: Journal    
DOI: 10.1080/02786826.2010.517814     Document Type: Article

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