Optimization of preventive maintenance scheduling in semiconductor manufacturing models using a simulation-based approximate dynamic programming approach

Proceedings of the IEEE Conference on Decision and Control

Volumn , Issue , 2010, Pages 3944-3949

  Ramírez Hernández, José A ^a   Fernandez, Emmanuel ^a  

^a University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SYSTEMS PROGRAMMING; COST FUNCTIONS; GRADIENT METHODS; HEURISTIC METHODS; LEARNING ALGORITHMS; PARAMETER ESTIMATION; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

ACTOR-CRITIC ARCHITECTURES; APPROXIMATE DYNAMIC PROGRAMMING; INFINITE HORIZON AVERAGE COSTS; OPTIMIZATION MODELING; PREVENTIVE MAINTENANCE (PM); SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR MANUFACTURING SYSTEMS; TEMPORAL DIFFERENCE LEARNING;

DYNAMIC PROGRAMMING;

EID: 79953156913     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: 10.1109/CDC.2010.5717523     Document Type: Conference Paper

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