Optimal preventive maintenance scheduling in semiconductor manufacturing systems: Software tool and simulation case studies

IEEE Transactions on Semiconductor Manufacturing

Volumn 23, Issue 3, 2010, Pages 477-489

  Ramírez Hernández, José A ^a   Crabtree, Jason ^b   Yao, Xiaodong ^c   Fernandez, Emmanuel ^a   Fu, Michael C ^d   Janakiram, Mani ^e,f   Marcus, Steven I ^d   O'Connor, Matilda ^g   Patel, Nipa ^h  

^a University of Cincinnati   (United States)

^b Integral Analytics Inc   (United States)

^c SAS INSTITUTE INC   (United States)

^d UNIVERSITY OF MARYLAND   (United States)

^e INTEL CORPORATION   (United States)

^f THUNDERBIRD SCHOOL OF GLOBAL MANAGEMENT   (United States)

^g Bits Bytes and Bots Computer Adventures   (United States)

^h IBM MICROELECTRONICS   (United States)

Author keywords

Optimal preventive maintenance (PM) scheduling; simulation case studies; software tool

Indexed keywords

COMPLEX SIMULATION; OPTIMAL PREVENTIVE MAINTENANCE; OPTIMAL SCHEDULING; OPTIMIZATION ALGORITHMS; SCHEDULING SIMULATION; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR MANUFACTURING SYSTEMS; SOFTWARE MODULES; SOFTWARE TOOL; TOOL PRODUCTION;

COMPUTER SIMULATION; COMPUTER SOFTWARE; COMPUTER SOFTWARE MAINTENANCE; INDUSTRIAL APPLICATIONS; OPTIMIZATION; RESEARCH; SEMICONDUCTOR DEVICE MANUFACTURE;

PREVENTIVE MAINTENANCE;

EID: 77955458798     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2010.2051731     Document Type: Article

References (22)

1. M. Venables, "Small is beautiful: Small, low-volume semiconductor manufacturing plants," IEE Rev., vol.51, no.3, pp. 26-27, Mar. 2005.
2. J. Blau, "News analysis: Europe's semiconductor makers are back in the game," IEEE Spectr., vol.40, no.2, pp. 18-19, Feb. 2003.
3. X. Yao, M. C. Fu, S. I. Marcus, and E. Fernandez-Gaucherand, "Optimization of preventive maintenance scheduling for semiconductor manufacturing systems: Models and implementation," in Proc. IEEE Int. Conf. Control Applications, 2001, pp. 407-411.
4. X. Yao, M. C. Fu, S. I. Marcus, and E. Fernandez-Gaucherand, "Incorporating production planning into preventive maintenance scheduling in semiconductor fabs," in Proc. Int. Conf. MASM, 2002, pp. 84-89.
5. X. Yao, E. Fernandez-Gaucherand, M. C. Fu, and S. I. Marcus, "Optimal preventive maintenance scheduling in semiconductor manufacturing," IEEE Trans. Semicond. Manuf., vol.17, no.3, pp. 345-356, Aug. 2004.
6. J. A. Ramírez-Herńandez and E. Fernandez-Gaucherand, "An algorithm to convert wafer to calendar-based preventive maintenance schedules for semiconductor manufacturing systems," in Proc. 42nd IEEE Conf. Decision Control, 2003, pp. 5926-5931.
7. J. A. Ramírez-Herńandez, E. Fernandez, M. O'Connor, and N. Patel, "Conversion of noncalendar to calendar-time-based preventive maintenance schedules for semiconductor manufacturing systems," J. Quality Maintenance Eng., vol.13, no.3, pp. 259-275, 2007.
8. S. Bhatnagar, E. Fernandez-Gaucherand, M. C. Fu, Y. He, and S. I. Marcus, "A Markov decision processes model for capacity expansion and allocation," in Proc. 38th IEEE Conf. Decision Control, 1999, pp. 1380-1385.
9. J. Crabtree, "Optimal preventive maintenance scheduling in semiconductor fabs," M.S. thesis, Dept. Elect. Comput. Eng., Univ. Cincinnati, Cincinnati, OH, 2003.
10. Real-Time Dispatcher. Applied Materials, Inc. [Online]. Available: http://www.appliedmaterials.com/products/rt dispatch 2.html
11. D. Applegate, W. Cook, S. Dash, and M. Mevenkamp. (2009). Mps Format [Online]. Available: http://www2.isye.gatech.edu/ wcook/qsopt/hlp/ff mps format.htm
12. I. Maros, Computational Techniques of the Simplex Method. Boston, MA: Kluwer Academic, 2003.
13. R. Fourer. (2005). Linear Programming: Software Survey [Online]. Available: http://www.lionhrtpub.com/orms/orms-6-05/frsurvey.html
14. R. Fourer, D. M. Gay, and B. W. Kernighan, "A modeling language for mathematical programming," Manage. Sci., vol.36, no.2, pp. 519-554, 1990.
15. R. Fourer, D. M. Gay, and B. W. Kernighan, AMPL: A Modeling Language for Mathematical Programming. Belmont, CA: Duxbury Press Brooks Cole Publishing Company, 1993.
16. OPL Studio. ILOG, Inc. [Online]. Available: http://www.ilog.com/ products/oplstudio/
17. D. G. Wilson and B. D. Rudin, "Introduction to the IBM optimization subroutine library," IBM Syst. J., vol.31, no.1, pp. 4-10, Jan. 1992.
18. CPLEX Optimizers. ILOG, Inc. [Online]. Available: http://www.ilog.com/ products/cplex/
19. AutoSched AP. Applied Materials, Inc. [Online]. Available: http://www.appliedmaterials.com/products/autosched ap 2.html
20. T. Phillips, "Autosched AP by autosimulations," in Proc. Winter Simulation Conf., 1998, pp. 219-222.
21. B. W. Kernighan and D. M. Ritchie, The C Programming Language, 1st ed. Englewood Cliffs, NJ: Prentice Hall, 1978.
22. B. Stroustrup, The C++ Programming Language, special ed. Reading, MA: Addison-Wesley, 2000.