Laser surface structuring with long depth of focus

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7920, Issue , 2011, Pages

  Michalowski, Andreas ^a   Freitag, Christian ^a   Weber, Rudolf ^a   Graf, Thomas ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Axicon; Bessel beam; Laser ablation; Laser grooving; Laser marking; Long focal depth

Indexed keywords

AXICON; BESSEL BEAM; LASER GROOVING; LASER MARKING; LONG FOCAL DEPTH;

BESSEL FUNCTIONS; LASER ABLATION; LASER APPLICATIONS; LASER BEAMS; MANUFACTURE; MARKING MACHINES; MICROELECTRONICS;

GEOMETRICAL OPTICS;

EID: 79952999640     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.881189     Document Type: Conference Paper

References (7)

1. J. H. McLeod, "The axicon: A new type of optical element," J. Opt. Soc. Am. 44, pp. 592-592, Aug 1954.
2. M. Rioux, R. Tremblay, and P. Belanger, "Linear, annular, and radial focusing with axicons and applications to laser machining," Applied Optics 17(10), pp. 1532-1536, 1978. (Pubitemid 8635502)
3. M. Kohno and Y. Matsuoka, "Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens," JSME International Journal Series B Fluids and Thermal Engineering 47(3), pp. 497-500, 2004. (Pubitemid 39364496)
4. Y. Matsuoka, Y. Kizuka, and T. Inoue, "The characteristics of laser micro drilling using a bessel beam," Applied Physics A: Materials Science & Processing 84, pp. 423-430, 2006. 10.1007/s00339-006-3629-6. (Pubitemid 44048475)
5. V. Jarutis, R. Paskauskas, and A. Stabinis, "Focusing of laguerre-gaussian beams by axicon," Optics Communications 184(1-4), pp. 105 - 112, 2000.
6. S. Akturk, B. Zhou, B. Pasquiou, M. Franco, and A. Mysyrowicz, "Intensity distribution around the focal regions of real axicons," Optics Communications 281(17), pp. 4240 - 4244, 2008.
7. J. W. Goodman, Introduction to Fourier optics, Roberts & Co. Publishers, Englewood, Colo, 3. ed. ed., 2005.